Smart FOUP Nest for Cleanroom Containers
Automated infeed and outfeed of wafer boxes with integrated sensor, RFID, and camera technology.
Initial Situation
Within an existing production system, cleanroom wafer boxes had to be safely introduced into the process and removed from it..
In addition to the mechanical handover, reliable identification and condition monitoring of the boxes were essential.
Requirements for the Solution
Secure infeed and outfeed of cleanroom boxes
Automated identification using RFID
Sensor-based detection of contents and fill status
Camera-based inspection for damage
Cleanroom-compatible construction
Integration into existing equipment and control systems
Our Solution and the Resulting Benefits
We developed a mobile, automatic operated box nest system as an intelligent handling and inspection unit.
The stable housing, integrated energy supply, and modular structure form the foundation. Sensors, RFID modules, and camera systems are seamlessly integrated to enable automated inspection and identification.
This results in a flexible solution for secure material handling directly at the point of integration — precisely aligned with the respective production process and existing infrastructure.
Increased Process Reliability
Each box is clearly identified and inspected before entering the process.
Automated Quality Control
Damage or deviations are detected at an early stage.
Reduction of Manual Inspection Processes
Sensors and cameras take over monitoring functions.
Seamless System Integration
The solution is fully integrated into existing production systems.
Improved Traceability
RFID technology enables transparent material tracking.
Technological Integration
The box nest combines mechanical construction, sensor technology, RFID systems, and camera technology in a compact, cleanroom-compatible unit.
The design was developed with consideration of cleanliness requirements, ESD aspects, and existing control and process structures.


