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Smart FOUP Nest for Cleanroom Containers

Automated infeed and outfeed of wafer boxes with integrated sensor, RFID, and camera technology.

Initial Situation


Within an existing production system, cleanroom wafer boxes had to be safely introduced into the process and removed from it..

In addition to the mechanical handover, reliable identification and condition monitoring of the boxes were essential.

Requirements for the Solution​



     Secure infeed and outfeed of cleanroom boxes

     Automated identification using RFID

     Sensor-based detection of contents and fill status

     Camera-based inspection for damage

     Cleanroom-compatible construction

     Integration into existing equipment and control systems


Our Solution and the Resulting Benefits


We developed a mobile, automatic operated box nest system as an intelligent handling and inspection unit.​

The stable housing, integrated energy supply, and modular structure form the foundation. Sensors, RFID modules, and camera systems are seamlessly integrated to enable automated inspection and identification.

This results in a flexible solution for secure material handling directly at the point of integration — precisely aligned with the respective production process and existing infrastructure.​

1

Increased Process Reliability


Each box is clearly identified and inspected before entering the process.

2

Automated Quality Control


Damage or deviations are detected at an early stage.

3

Reduction of Manual Inspection Processes

Sensors and cameras take over monitoring functions.

4

Seamless System Integration


The solution is fully integrated into existing production systems.

5

Improved Traceability


RFID technology enables transparent material tracking.

Technological Integration


The box nest combines mechanical construction, sensor technology, RFID systems, and camera technology in a compact, cleanroom-compatible unit.

The design was developed with consideration of cleanliness requirements, ESD aspects, and existing control and process structures.